- dry etching resist
- 干蚀刻抗蚀剂
English-Chinese computer dictionary (英汉计算机词汇大词典). 2013.
English-Chinese computer dictionary (英汉计算机词汇大词典). 2013.
Resist — is also an album by Kosheen and a song by Rush. In semiconductor fabrication, resist refers to both: # A thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. A resist can be patterned via… … Wikipedia
Etching — For other uses of etch or etching, see Etching (disambiguation), for the history of the method, see old master prints. The Soldier and his Wife. Etching by Daniel Hopfer, who is believed to have been the first to apply the technique to… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Plasma etcher — A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. Plasma etcher produces a plasma from a process gas, typically oxygen or a fluorine bearing gas, using a high frequency electric field, typically 13.56… … Wikipedia
Cantilever — For the figure skating element, see Cantilever (figure skating). A schematic image of two cantilevers. The top example has a full moment connection (like a horizontal flag pole bolted to the side of a building). The bottom example is created by… … Wikipedia
Adamantane — Adamantane … Wikipedia
Фотонный кристалл — Фотонный кристалл это материал, структура которого характеризуется периодическим изменением показателя преломления в пространственных направлениях[1]. В другой работе[2] встречается расширенное определение фотонных кристаллов … … Википедия
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
photoengraving — /foh toh en gray ving/, n. 1. a photographic process of preparing printing plates for letterpress printing. 2. a plate so produced. 3. a print made from it. [1870 75; PHOTO + ENGRAVING] * * * Any of several processes for producing printing plates … Universalium
integrated circuit — Electronics. a circuit of transistors, resistors, and capacitors constructed on a single semiconductor wafer or chip, in which the components are interconnected to perform a given function. Abbr.: IC Also called microcircuit. [1955 60] * * * ▪… … Universalium